Transport Characterization Laboratory
Equipment
Agilent Characterization System
- Agilent 4156C Precision Semiconductor Parameter Analyzer w/Quasi Static CV
- Agilent 41501B SMU and Pulse Generator Unit – 500kHz dual pulse generators for pulse voltage stressing and charge pumping measurements
- Agilent 16440A SMU/Pulse Generator Selector
- Agilent E5250A Low Leakage Switch Matrix
- Agilent 81110A Pulse/Pattern Generator Unit
- HP 4284A LCR meter
- Metrics Technology Interactive Characterization Software (Controls 4156C system for automation!)
- Agilent E3662B Rack Cabinet – Modularizes the Agilent Characterization System
- Custom built aluminum Faraday cage with shielded probe feed-throughs
Keithly Characterization Systems
- 2-Keithley 4200 Semiconductor Characterization System – 4 source measurement units and 4 pre-amps with 0.1 femtoampere current resolution. One 4200 has the PIV-A, PIV-Q, and C-V options
- Keithley 595 Quasistatic CV Meter
- 2 HP 4284A LCR meter
- 2 Keithley 707A Ultra Low Current-High Frequency Solid State Switching matrix (3-8X24 I/O cards)
Variable Temperature Probe Station
- Janis Research Probe Station
- Edwards EXT 70H Compound Molecular Pump
- Edwards E2M1.5 Rotary Vacuum Pump
- Edwards EXDC80 Turbomolecular Pump
- Lakeshore 340 Temperature Controller
Low Noise Spectroscopy Station
- 1 DC Battery Powered Source
- 1 Yokogawa 765101-A-3/D Programmable DC Voltage/Current Source with Front Output Terminal and GPIB, 115/100 V AC, UL Standard
- 1 Hewlett Packard 34401A Multimeter
- 1 Pomona Shielded Housing for 100 K Resistors
- 1 Stanford Research SR560 Low Noise Preamplifier
- 1 Hewlett Packard (HP) 35665A Dynamic Signal Analyzer (DSA)
- 8 Cascade Microtech DCP Coaxial Probes and Mount
Additional Equipment
- 3-Micromanipulator Probe Stations & Faraday Cages
- One altered station to accommodate through wafer interconnects
- 24 Cascade Microtech DCM-Series MicroManipulators
- Several Agilent 16495F Connector Plates
- Agilent 81110A Pulse/Pattern Generator Unit (2 channels – frequency range up to 330MHz)*
- Agilent Infiniium 54832D 1GHz 4 channel 4GSamples/s Mixed Signal Oscilloscope with Windows XP Interface
- 2-Stanford Research SR830 DSP Lock-In Amplifiers
Resources
Keithley Training
Other Keithley Resources
Students
Graduate Students
Undergraduate Students
- Ryan Thompson (ECE, Winter Break 2008)
- Shem Purnell (ECE, Winter Break 2009)
- Blake Rapp (ECE, Spring 2010)
Collaborators
- Dr. Gennadi Bersuker & Dr. Rino Choi (SEMATECH)
- Professor Tibor Grasser (Technische Universität Wien, Austria)
- Dr. Ben Kaczer (Inter-University Microelectronics Center-IMEC, Leuven, Belgium)
- Prof. L. Larcher and Dr. A. Padovani (Università di Modena e Reggio Emilia, Modène, Italy)
- Professor A. J. Moll (Materials Science and Engineering)
- Professor Kris Campbell (Electrical and Computer Engineering)
- Professor Darryl Butt (Materials Science and Engineering)