Manufacturer:
Headway Research Inc.
Model:
PWM 32-PS-R 790
Description:
Designed for hand dispensing of resist on a 4″ or 6″ wafer. Wafer is held to a chuck by vacuum and spun at high speeds to get a uniform coating. The time and speed of the spinning can be programmed with the on-board controller.
For a list of the current recipes, click here.
Operation Procedure